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 SCI is a world leader in providing high resolution thin-film metrology systems and analysis software products to leading companies in the semiconductor, optoelectronics, data storage, display, MEMS, and optical coating industries. SCI is a privately held company headquartered in Carlsbad, California, with a global network of sales, service, and support offices strategically located in the United Kingdom, Germany, Taiwan, Singapore, Korea, and Japan.
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| Metrology Products:
Spectroscopic Ellipsometers, Reflectometers, Multiple Angle Reflectometers, and Generalized Ellipsometry for Optical CD Measurement
Affordable Thin Film Measurement Systems for Virtually Every Budget
Reflection and Transmission Spectrophotometry
FilmTek™ 1000 / 1000M / 1500 models are accurate and economical thin film measurement systems for measuring film thickness, refractive index, and extinction coefficient. Collects reflection data at normal incidence in the visible to NIR, and is ideal for film thickness measurement. The FilmTek™ 1500 adds transmission mode measurements to reflection and is ideal for films on transparent substrates.
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| FilmTek™1000FixedStage |
StageFilmTek™ 1000ManualXY
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FilmTek™ 1000M Automated XY Stage |
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FilmTek™2000 / 2000M / 2000 PAR models augment those thin film measurement capabilities to encompass surface roughness and reflection at normal incidence from deep UV to NIR. Options include optics for small spot size measurements based on a microscope design (FilmTek™ 2000M) or parabolic mirrors (FilmTek™ 2000 PAR). |
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| FilmTek™ 1500 Automated XY Stage |
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FilmTek™ 3000 / 3000M / 3000 PAR measures transmission and reflection of films deposited on transparent substrates. These thin film measurement systems are ideally suited for measuring the thickness and optical constants of very thin absorbing films. The FilmTek™ 3000M has a small spot size (40 µm) and can be equipped with a large custom stage for flat panel display applications |
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| FilmTek™ 2000 PAR |
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FilmTek™ 2000SE and FilmTek™ 3000SE Spectroscopic Ellipsometer
FilmTek™ 2000SE / 3000SE is a high performance spectroscopic ellipsometer that measures from the deep UV to NIR. Based on a rotating compensator design, the FilmTek™ 2000SE spectroscopic ellipsometer combines spectroscopic ellipsometry with normal incidence DUV reflectometry to make it ideally suited for measuring the film thickness and optical constants >of very thin films. The FilmTek™ 3000SE spectroscopic ellipsometer adds transmission measurement capability in addition to spectroscopic ellipsometry and multiple angle reflectometry. The FilmTek™ 2000SE spectroscopic ellipsometer utilizes SCI's material modeling software to provide an affordable and reliable thin film measurement tool for the simultaneous measurement of film thickness, refractive index, and extinction coefficient.
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| FilmTek™ 3000 PAR |
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| FilmTek™ 3000SE |
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